Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride

This paper evaluates the mechanical properties of amorphous silicon carbon nitride (a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></sem...

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Main Authors: Chaoyue Ji, Xintian Cai, Zhen Zhou, Bing Gao, Sheng Liu
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/15/19/6865
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author Chaoyue Ji
Xintian Cai
Zhen Zhou
Bing Gao
Sheng Liu
author_facet Chaoyue Ji
Xintian Cai
Zhen Zhou
Bing Gao
Sheng Liu
author_sort Chaoyue Ji
collection DOAJ
description This paper evaluates the mechanical properties of amorphous silicon carbon nitride (a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></semantics></math></inline-formula>N<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>y</mi></msub></semantics></math></inline-formula>) films with different atomic ratios via molecular dynamics simulation. The Si-C-N ternary amorphous model is constructed using ReaxFF potential and melt-quenching method. The results demonstrate that the density range of constructed model spans a wide range of densities (2.247–2.831 g/cm<sup>3</sup>). The short- and medium-range order of the constructed a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></semantics></math></inline-formula>N<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>y</mi></msub></semantics></math></inline-formula> structures show a good correlation with the experimental observations. Based on the structural feasibility, the elastoplastic performance is analyzed. There is significant ductility during the uniaxial tension process of a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></semantics></math></inline-formula>N<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>y</mi></msub></semantics></math></inline-formula>, except for Si(CN<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mn>2</mn></msub></semantics></math></inline-formula>)<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mn>2</mn></msub></semantics></math></inline-formula>. The calculated elastic modulus ranges from 206.80 GPa to 393.58 GPa, close to the experimental values of coating films. In addition, the elastic modulus of a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></semantics></math></inline-formula>N<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>y</mi></msub></semantics></math></inline-formula> does not change monotonically with the carbon or silicon content but is related to the atomic ratio. This article provides an understanding of the chemical composition dependence of the mechanical properties of amorphous compounds at the molecular level.
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spelling doaj.art-16b3ab4b3771435db1427dc0e450fba92023-11-23T20:58:06ZengMDPI AGMaterials1996-19442022-10-011519686510.3390/ma15196865Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon NitrideChaoyue Ji0Xintian Cai1Zhen Zhou2Bing Gao3Sheng Liu4The Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThe Institute of Technological Sciences, Wuhan University, Wuhan 430072, ChinaThis paper evaluates the mechanical properties of amorphous silicon carbon nitride (a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></semantics></math></inline-formula>N<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>y</mi></msub></semantics></math></inline-formula>) films with different atomic ratios via molecular dynamics simulation. The Si-C-N ternary amorphous model is constructed using ReaxFF potential and melt-quenching method. The results demonstrate that the density range of constructed model spans a wide range of densities (2.247–2.831 g/cm<sup>3</sup>). The short- and medium-range order of the constructed a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></semantics></math></inline-formula>N<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>y</mi></msub></semantics></math></inline-formula> structures show a good correlation with the experimental observations. Based on the structural feasibility, the elastoplastic performance is analyzed. There is significant ductility during the uniaxial tension process of a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></semantics></math></inline-formula>N<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>y</mi></msub></semantics></math></inline-formula>, except for Si(CN<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mn>2</mn></msub></semantics></math></inline-formula>)<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mn>2</mn></msub></semantics></math></inline-formula>. The calculated elastic modulus ranges from 206.80 GPa to 393.58 GPa, close to the experimental values of coating films. In addition, the elastic modulus of a-SiC<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>x</mi></msub></semantics></math></inline-formula>N<inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><msub><mrow></mrow><mi>y</mi></msub></semantics></math></inline-formula> does not change monotonically with the carbon or silicon content but is related to the atomic ratio. This article provides an understanding of the chemical composition dependence of the mechanical properties of amorphous compounds at the molecular level.https://www.mdpi.com/1996-1944/15/19/6865mechanical propertiesmolecular dynamicssilicon carbon nitridestructural characterization
spellingShingle Chaoyue Ji
Xintian Cai
Zhen Zhou
Bing Gao
Sheng Liu
Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride
Materials
mechanical properties
molecular dynamics
silicon carbon nitride
structural characterization
title Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride
title_full Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride
title_fullStr Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride
title_full_unstemmed Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride
title_short Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride
title_sort effects of atomic ratio on the mechanical properties of amorphous silicon carbon nitride
topic mechanical properties
molecular dynamics
silicon carbon nitride
structural characterization
url https://www.mdpi.com/1996-1944/15/19/6865
work_keys_str_mv AT chaoyueji effectsofatomicratioonthemechanicalpropertiesofamorphoussiliconcarbonnitride
AT xintiancai effectsofatomicratioonthemechanicalpropertiesofamorphoussiliconcarbonnitride
AT zhenzhou effectsofatomicratioonthemechanicalpropertiesofamorphoussiliconcarbonnitride
AT binggao effectsofatomicratioonthemechanicalpropertiesofamorphoussiliconcarbonnitride
AT shengliu effectsofatomicratioonthemechanicalpropertiesofamorphoussiliconcarbonnitride