The Effect of Excited Species on the Collisional Energy of Argon Inductively Coupled Plasmas: A Global Model Study
Global modeling of inductively coupled plasma (ICP) reactors is a powerful tool to investigate plasma parameters. In this article, the argon ICP global model is revisited to explore the effect of excited species on collisional energy through the study of different approaches to particle and energy b...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-01-01
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| Series: | Plasma |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2571-6182/5/1/3 |