Magnetron Sputtered ZnO Thin Films for Hydrogen Peroxide Vapor Detection
In this study, we report the design and fabrication of a high- performance hydrogen peroxide vapor sensor based on La doped ZnO nanstructured film using the high-frequency magnetron sputtering method. The response (Rgas/Rair) of the sensor was measured at various operating temperature to different c...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2020-11-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/november_2020/Vol_246/P_3183.pdf |