Study of reactive electron beam deposited tantalum penta oxide thin films with spectroscopic ellipsometry and atomic force microscopy
The optical and surface morphological properties of thin films are profoundly influenced by the deposition technique and the various process parameters employed. In present work, several tantalum penta oxide thin films have been fabricated using reactive electron beam evaporation at varying oxygen (...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-12-01
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| Series: | Applied Surface Science Advances |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523923001149 |