Phase control of α- and κ-Ga2O3 epitaxial growth on LiNbO3 and LiTaO3 substrates using α-Fe2O3 buffer layers
LiNbO3 and LiTaO3 substrates are used in wide-bandwidth applications such as surface acoustic wave filter and show structural similarity to α-Ga2O3. In this study, we demonstrated the phase control of Ga2O3 epitaxial thin films, grown by mist chemical vapor deposition, on the (0001) planes of LiNbO3...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2020-05-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0006137 |