Phase control of α- and κ-Ga2O3 epitaxial growth on LiNbO3 and LiTaO3 substrates using α-Fe2O3 buffer layers

LiNbO3 and LiTaO3 substrates are used in wide-bandwidth applications such as surface acoustic wave filter and show structural similarity to α-Ga2O3. In this study, we demonstrated the phase control of Ga2O3 epitaxial thin films, grown by mist chemical vapor deposition, on the (0001) planes of LiNbO3...

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Bibliographic Details
Main Authors: Kazuki Shimazoe, Hiroyuki Nishinaka, Yuta Arata, Daisuke Tahara, Masahiro Yoshimoto
Format: Article
Language:English
Published: AIP Publishing LLC 2020-05-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0006137