Ion current collection by double flush-mounted probe in intermediate-pressure plasmas
A double flush-mounted probe method is proposed to analyze the characteristics of intermediate-pressure plasmas (10–100 Pa) by a sheath criterion. The analytical model mainly focuses on the effect of the ion drift velocity in the sheath edge and then provides a correction factor for the measured ion...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0007051 |