Roll-to-plate 0.1-second shear-rolling process at elevated temperature for highly aligned nanopatterns
Abstract The shear-rolling process is a promising directed self-assembly method that can produce high-quality sub−10 nm block copolymer line-space patterns cost-effectively and straightforwardly over a large area. This study presents a high temperature (280 °C) and rapid (~0.1 s) shear-rolling proce...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2023-12-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-023-43766-2 |