Method for Analyzing the Measurement Error with Respect to Azimuth and Incident Angle for the Rotating Polarizer Analyzer Ellipsometer
We proposed a method to study the effects of azimuth and the incident angle on the accuracy and stability of rotating polarizer analyzer ellipsometer (RPAE) with bulk Au. The dielectric function was obtained at various incident angles in a range of 55°–80° and analyzed with the spectrum of the princ...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-03-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/11/4/349 |