Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics†

We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be sol...

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Bibliographic Details
Main Authors: Nicolas Craquelin, Aurélie Barras, Peter Ryser, Grégoire Boutinard-Rouelle, Yannick Fournier, Thomas Maeder
Format: Article
Language:English
Published: MDPI AG 2010-12-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/10/12/11156/