Scalable, Nanometer‐Accurate Fabrication of All‐Dielectric Metasurfaces with Narrow Resonances Tunable from Near Infrared to Visible Wavelengths

Scalable, Nanometer‐Accurate Fabrication of All‐Dielectric Metasurfaces with Narrow Resonances Tunable from Near Infrared to Visible Wavelengths

Dielectric metasurfaces are a class of flat‐optical elements that provide new ways to manipulate light. Irrespective of the underlying operation principle, the realization of such nanometer‐sized structures requires a high fabrication accuracy, e.g., to match resonant conditions. While electron‐beam...

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Bibliographic Details
Main Authors: Giulia Prone, Ute Drechsler, Christoph Mayr, Olga Semenova, Christine Thanner, Antonis Olziersky, Martin Eibelhuber, Marcel Mayor, Emanuel Lörtscher
Format: Article
Language:English
Published: Wiley-VCH 2022-09-01
Series:Advanced Photonics Research
Subjects:
absorption
electron-beam lithography
metasurfaces
mie resonators
nanoimprint lithography
Online Access:https://doi.org/10.1002/adpr.202200014

Internet

https://doi.org/10.1002/adpr.202200014

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