Advancements in greenhouse gas emission reduction methodology for fluorinated compounds and N2O in the semiconductor industry via abatement systems
Greenhouse gases (GHGs), particularly fluorinated compounds (FCs), nitrous oxide (N2O), and nitrogen trifluoride (NF3), contribute significantly to climate change, and the semiconductor industry is a notable emitter of these gases. This report introduces an innovative methodology for GHG emission re...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2024-01-01
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| Series: | Frontiers in Energy Research |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fenrg.2023.1234486/full |