Control of Competing Thermodynamics and Kinetics in Vapor Phase Thin-Film Growth of Nitrides and Borides
Thin-film growth is a platform technique that allows the preparation of various undeveloped materials and enables the development of novel energy generation devices. Preferred phase formation, control of crystalline orientation and quality, defect concentration, and stoichiometry in thin films are...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2021-07-01
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| Series: | Frontiers in Chemistry |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fchem.2021.642388/full |