Universal Digital Probe Electrometer for Testing Semiconductor Wafers
Non-contact electrical methods are widely used for research and control of semiconductor wafers. The methods are usually based on surface potential measurement (CPD) in combination with illumination and/or deposition of charges on the sample using a corona discharge, and are also based on the measur...
| Huvudupphovsmän: | , , , |
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| Materialtyp: | Artikel |
| Språk: | English |
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Belarusian National Technical University
2023-10-01
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| Serie: | Приборы и методы измерений |
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| Länkar: | https://pimi.bntu.by/jour/article/view/828 |