A LN/Si-Based SAW Pressure Sensor

A LN/Si-Based SAW Pressure Sensor

Surface Acoustic Wave (SAW) sensors are small, passive and wireless devices. We present here the latest results obtained in a project aimed at developing a SAW-based implantable pressure sensor, equipped with a well-defined, 30 μm-thick, 4.7 mm-in-diameter, Lithium Niobate (LN) membrane. A no...

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Bibliographic Details
Main Authors: Pascal Nicolay, Hugo Chambon, Gudrun Bruckner, Christian Gruber, Sylvain Ballandras, Emilie Courjon, Matthias Stadler
Format: Article
Language:English
Published: MDPI AG 2018-10-01
Series:Sensors
Subjects:
SAW pressure sensor
multilayer substrate
thin LN membranes
LN/Si
wafer-bonding
Online Access:http://www.mdpi.com/1424-8220/18/10/3482

Internet

http://www.mdpi.com/1424-8220/18/10/3482

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