Channel Shape Effects on Device Instability of Amorphous Indium–Gallium–Zinc Oxide Thin Film Transistors

Channel shape dependency on device instability for amorphous indium–gallium–zinc oxide (a-IGZO) thin film transistors (TFTs) is investigated by using various channel shape devices along with systematic electrical characterization including DC I-V characeristics and bias temperature stress tests. a-I...

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Main Authors: Seung Gi Seo, Seung Jae Yu, Seung Yeob Kim, Jinheon Jeong, Sung Hun Jin
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/12/1/2
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author Seung Gi Seo
Seung Jae Yu
Seung Yeob Kim
Jinheon Jeong
Sung Hun Jin
author_facet Seung Gi Seo
Seung Jae Yu
Seung Yeob Kim
Jinheon Jeong
Sung Hun Jin
author_sort Seung Gi Seo
collection DOAJ
description Channel shape dependency on device instability for amorphous indium–gallium–zinc oxide (a-IGZO) thin film transistors (TFTs) is investigated by using various channel shape devices along with systematic electrical characterization including DC I-V characeristics and bias temperature stress tests. a-IGZO TFTs with various channel shapes such as zigzag, circular, and U-type channels are implemented and their vertical and lateral electric field stress (E-field) effects are systematically tested and analyzed by using an experimental and modeling study. Source and drain (S/D) electrode asymmetry and vertical E-field effects on device instability are neglibible, whereas the lateral E-field effects significantly affect device instability, particularly for zigzag channel shape, compared to circular and U-type TFTs. Moreover, charge trapping time (<i>τ</i>) for zigzag-type a-IGZO TFTs is extracted as 3.8 × 10<sup>4</sup>, which is at least three-times smaller than those of other channel-type a-IGZO TFTs, hinting that local E-field enhancement can critically affect the device reliability. The Technology Computer Aided Design (TCAD) simulation results reveal the locally enhanced E-field at both corner region in the channel in a quantitative mode and its correlation with hemisphere radius (<i>ρ</i>) values.
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spelling doaj.art-18de5635bdc94ef392cb812925f09ed02023-11-21T02:02:01ZengMDPI AGMicromachines2072-666X2020-12-01121210.3390/mi12010002Channel Shape Effects on Device Instability of Amorphous Indium–Gallium–Zinc Oxide Thin Film TransistorsSeung Gi Seo0Seung Jae Yu1Seung Yeob Kim2Jinheon Jeong3Sung Hun Jin4Department of Electronic Engineering, Incheon National University, Incheon 406-772, KoreaDepartment of Electronic Engineering, Incheon National University, Incheon 406-772, KoreaDepartment of Electronic Engineering, Incheon National University, Incheon 406-772, KoreaDepartment of Electronic Engineering, Incheon National University, Incheon 406-772, KoreaDepartment of Electronic Engineering, Incheon National University, Incheon 406-772, KoreaChannel shape dependency on device instability for amorphous indium–gallium–zinc oxide (a-IGZO) thin film transistors (TFTs) is investigated by using various channel shape devices along with systematic electrical characterization including DC I-V characeristics and bias temperature stress tests. a-IGZO TFTs with various channel shapes such as zigzag, circular, and U-type channels are implemented and their vertical and lateral electric field stress (E-field) effects are systematically tested and analyzed by using an experimental and modeling study. Source and drain (S/D) electrode asymmetry and vertical E-field effects on device instability are neglibible, whereas the lateral E-field effects significantly affect device instability, particularly for zigzag channel shape, compared to circular and U-type TFTs. Moreover, charge trapping time (<i>τ</i>) for zigzag-type a-IGZO TFTs is extracted as 3.8 × 10<sup>4</sup>, which is at least three-times smaller than those of other channel-type a-IGZO TFTs, hinting that local E-field enhancement can critically affect the device reliability. The Technology Computer Aided Design (TCAD) simulation results reveal the locally enhanced E-field at both corner region in the channel in a quantitative mode and its correlation with hemisphere radius (<i>ρ</i>) values.https://www.mdpi.com/2072-666X/12/1/2InGaZnOthin-film transistorinstabilitychannel shapeelectric field
spellingShingle Seung Gi Seo
Seung Jae Yu
Seung Yeob Kim
Jinheon Jeong
Sung Hun Jin
Channel Shape Effects on Device Instability of Amorphous Indium–Gallium–Zinc Oxide Thin Film Transistors
Micromachines
InGaZnO
thin-film transistor
instability
channel shape
electric field
title Channel Shape Effects on Device Instability of Amorphous Indium–Gallium–Zinc Oxide Thin Film Transistors
title_full Channel Shape Effects on Device Instability of Amorphous Indium–Gallium–Zinc Oxide Thin Film Transistors
title_fullStr Channel Shape Effects on Device Instability of Amorphous Indium–Gallium–Zinc Oxide Thin Film Transistors
title_full_unstemmed Channel Shape Effects on Device Instability of Amorphous Indium–Gallium–Zinc Oxide Thin Film Transistors
title_short Channel Shape Effects on Device Instability of Amorphous Indium–Gallium–Zinc Oxide Thin Film Transistors
title_sort channel shape effects on device instability of amorphous indium gallium zinc oxide thin film transistors
topic InGaZnO
thin-film transistor
instability
channel shape
electric field
url https://www.mdpi.com/2072-666X/12/1/2
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