High-velocity and large-coupling surface wave mode using acoustic Bragg reflector stack with matched excitation condition
High-velocity, large-coupling acoustic mode is the eternal pursuit of microacoustic research. Surface mode on piezoelectric films supported by an acoustic Bragg reflector (ABR) stack is one possible solution for realizing such a goal. However, some acoustic modes exhibit lower couplings in experimen...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2024-05-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0204157 |