On-Chip Modification of Titanium Electrothermal Characteristics by Joule Heating: Application to Terahertz Microbolometer

On-Chip Modification of Titanium Electrothermal Characteristics by Joule Heating: Application to Terahertz Microbolometer

This study demonstrates the conversion of metallic titanium (Ti) to titanium oxide just by conducting electrical current through Ti thin film in vacuum and increasing the temperature by Joule heating. This led to the improvement of electrical and thermal properties of a microbolometer. A microbolome...

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Bibliographic Details
Main Authors: Durgadevi Elamaran, Ko Akiba, Hiroaki Satoh, Amit Banerjee, Norihisa Hiromoto, Hiroshi Inokawa
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Nanomaterials
Subjects:
titanium
titanium oxide
Joule heating
temperature coefficient of resistance (TCR)
microbolometer
responsivity
Online Access:https://www.mdpi.com/2079-4991/14/2/225

Internet

https://www.mdpi.com/2079-4991/14/2/225

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