Development of MEMS Process Compatible (Bi,Sb)<sub>2</sub>(Se,Te)<sub>3</sub>-Based Thin Films for Scalable Fabrication of Planar Micro-Thermoelectric Generators

Development of MEMS Process Compatible (Bi,Sb)<sub>2</sub>(Se,Te)<sub>3</sub>-Based Thin Films for Scalable Fabrication of Planar Micro-Thermoelectric Generators

Bismuth telluride-based thin films have been investigated as the active material in flexible and micro thermoelectric generators (TEGs) for near room-temperature energy harvesting applications. The latter is a class of compact printed circuit board compatible devices conceptualized for operation at...

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Bibliographic Details
Main Authors: Prithu Bhatnagar, Daryoosh Vashaee
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Series:Micromachines
Subjects:
thermoelectric generators
MEMS
thermoelectric thin films
thermal evaporation
bismuth telluride
Online Access:https://www.mdpi.com/2072-666X/13/9/1459

Internet

https://www.mdpi.com/2072-666X/13/9/1459

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