MoS<sub>2</sub> Transistors with Low Schottky Barrier Contact by Optimizing the Interfacial Layer Thickness

Molybdenum disulfide (MoS<sub>2</sub>) has attracted great attention from researchers because of its large band gap, good mechanical toughness and stable physical properties; it has become the ideal material for the next-generation optoelectronic devices. However, the large Schottky barr...

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Main Authors: Jinbing Cheng, Junbao He, Chunying Pu, Congbin Liu, Xiaoyu Huang, Deyang Zhang, Hailong Yan, Paul K. Chu
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Energies
Subjects:
Online Access:https://www.mdpi.com/1996-1073/15/17/6169
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author Jinbing Cheng
Junbao He
Chunying Pu
Congbin Liu
Xiaoyu Huang
Deyang Zhang
Hailong Yan
Paul K. Chu
author_facet Jinbing Cheng
Junbao He
Chunying Pu
Congbin Liu
Xiaoyu Huang
Deyang Zhang
Hailong Yan
Paul K. Chu
author_sort Jinbing Cheng
collection DOAJ
description Molybdenum disulfide (MoS<sub>2</sub>) has attracted great attention from researchers because of its large band gap, good mechanical toughness and stable physical properties; it has become the ideal material for the next-generation optoelectronic devices. However, the large Schottky barrier height (<i>Φ<sub>B</sub></i>) and contact resistance are obstacles hampering the fabrication of high-power MoS<sub>2</sub> transistors. The electronic transport characteristics of MoS<sub>2</sub> transistors with two different contact structures are investigated in detail, including a copper (Cu) metal–MoS<sub>2</sub> channel and copper (Cu) metal–TiO<sub>2</sub>-MoS<sub>2</sub> channel. Contact optimization is conducted by adjusting the thickness of the TiO<sub>2</sub> interlayer between the metal and MoS<sub>2</sub>. The metal-interlayer-semiconductor (MIS) structure with a 1.5 nm thick TiO<sub>2</sub> layer has a smaller Schottky barrier of 22 meV. The results provide insights into the engineering of MIS contacts and interfaces to improve transistor characteristics.
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spelling doaj.art-1996865facbb4157ab110d831cee6e492023-11-23T13:01:28ZengMDPI AGEnergies1996-10732022-08-011517616910.3390/en15176169MoS<sub>2</sub> Transistors with Low Schottky Barrier Contact by Optimizing the Interfacial Layer ThicknessJinbing Cheng0Junbao He1Chunying Pu2Congbin Liu3Xiaoyu Huang4Deyang Zhang5Hailong Yan6Paul K. Chu7Henan International Joint Laboratory of MXene Materials Microstructure, College of Physics and Electronic Engineering, Nanyang Normal University, Nanyang 473061, ChinaHenan International Joint Laboratory of MXene Materials Microstructure, College of Physics and Electronic Engineering, Nanyang Normal University, Nanyang 473061, ChinaHenan International Joint Laboratory of MXene Materials Microstructure, College of Physics and Electronic Engineering, Nanyang Normal University, Nanyang 473061, ChinaHenan International Joint Laboratory of MXene Materials Microstructure, College of Physics and Electronic Engineering, Nanyang Normal University, Nanyang 473061, ChinaHenan International Joint Laboratory of MXene Materials Microstructure, College of Physics and Electronic Engineering, Nanyang Normal University, Nanyang 473061, ChinaKey Laboratory of Microelectronics and Energy of Henan Province, Engineering Research Center for MXene Energy Storage Materials of Henan Province, Henan Joint International Research Laboratory of New Energy Storage Technology, Xinyang Normal University, Xinyang 464000, ChinaKey Laboratory of Microelectronics and Energy of Henan Province, Engineering Research Center for MXene Energy Storage Materials of Henan Province, Henan Joint International Research Laboratory of New Energy Storage Technology, Xinyang Normal University, Xinyang 464000, ChinaDepartment of Physics, Department of Materials Science & Engineering, and Department of Biomedical Engineering, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong, ChinaMolybdenum disulfide (MoS<sub>2</sub>) has attracted great attention from researchers because of its large band gap, good mechanical toughness and stable physical properties; it has become the ideal material for the next-generation optoelectronic devices. However, the large Schottky barrier height (<i>Φ<sub>B</sub></i>) and contact resistance are obstacles hampering the fabrication of high-power MoS<sub>2</sub> transistors. The electronic transport characteristics of MoS<sub>2</sub> transistors with two different contact structures are investigated in detail, including a copper (Cu) metal–MoS<sub>2</sub> channel and copper (Cu) metal–TiO<sub>2</sub>-MoS<sub>2</sub> channel. Contact optimization is conducted by adjusting the thickness of the TiO<sub>2</sub> interlayer between the metal and MoS<sub>2</sub>. The metal-interlayer-semiconductor (MIS) structure with a 1.5 nm thick TiO<sub>2</sub> layer has a smaller Schottky barrier of 22 meV. The results provide insights into the engineering of MIS contacts and interfaces to improve transistor characteristics.https://www.mdpi.com/1996-1073/15/17/6169MoS<sub>2</sub>TiO<sub>2</sub>Schottky barriercontact resistance
spellingShingle Jinbing Cheng
Junbao He
Chunying Pu
Congbin Liu
Xiaoyu Huang
Deyang Zhang
Hailong Yan
Paul K. Chu
MoS<sub>2</sub> Transistors with Low Schottky Barrier Contact by Optimizing the Interfacial Layer Thickness
Energies
MoS<sub>2</sub>
TiO<sub>2</sub>
Schottky barrier
contact resistance
title MoS<sub>2</sub> Transistors with Low Schottky Barrier Contact by Optimizing the Interfacial Layer Thickness
title_full MoS<sub>2</sub> Transistors with Low Schottky Barrier Contact by Optimizing the Interfacial Layer Thickness
title_fullStr MoS<sub>2</sub> Transistors with Low Schottky Barrier Contact by Optimizing the Interfacial Layer Thickness
title_full_unstemmed MoS<sub>2</sub> Transistors with Low Schottky Barrier Contact by Optimizing the Interfacial Layer Thickness
title_short MoS<sub>2</sub> Transistors with Low Schottky Barrier Contact by Optimizing the Interfacial Layer Thickness
title_sort mos sub 2 sub transistors with low schottky barrier contact by optimizing the interfacial layer thickness
topic MoS<sub>2</sub>
TiO<sub>2</sub>
Schottky barrier
contact resistance
url https://www.mdpi.com/1996-1073/15/17/6169
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