Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure

Scanning Electron Microscopy Investigation of Surface Acoustic Wave Propagation in a 41° YX-Cut of a LiNbO<sub>3</sub> Crystal/Si Layered Structure

The propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41° YX-cut of a LiNbO<sub>3</sub> crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondar...

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Bibliographic Details
Main Authors: Dmitry Roshchupkin, Evgenii Emelin, Olga Plotitcina, Anatoly Mololkin, Oleg Telminov
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Crystals
Subjects:
LiNbO<sub>3</sub> crystal
Si crystal
surface acoustic wave
X-ray diffraction
scanning electron microscopy
LiNbO<sub>3</sub>/Si layered structure
Online Access:https://www.mdpi.com/2073-4352/11/9/1082

Internet

https://www.mdpi.com/2073-4352/11/9/1082

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