A MEMS Electrochemical Angular Accelerometer with Silicon-Based Four-Electrode Structure

A MEMS Electrochemical Angular Accelerometer with Silicon-Based Four-Electrode Structure

This paper presents a MEMS electrochemical angular accelerometer with a silicon-based four-electrode structure, which was made of thousands of interconnected microchannels for electrolyte flow, anodes uniformly coated on structure surfaces and cathodes located on the sidewalls of flow holes. From th...

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Bibliographic Details
Main Authors: Mingbo Zhang, Qinghua Liu, Maoqi Zhu, Jian Chen, Deyong Chen, Junbo Wang, Yulan Lu
Format: Article
Language:English
Published: MDPI AG 2024-02-01
Series:Micromachines
Subjects:
microelectromechanical system
electrochemical angular accelerometer
rotational sensor
silicon-based four-electrode structure
Online Access:https://www.mdpi.com/2072-666X/15/3/351

Internet

https://www.mdpi.com/2072-666X/15/3/351

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