Three‐Dimensional Atomic‐Scale Tomography of Buried Semiconductor Heterointerfaces
Abstract Atom probes generate three‐dimensional atomic‐scale tomographies of material volumes corresponding to the size of modern‐day solid‐state devices. Here, the capabilities of atom probe tomography are evaluated to analyze buried interfaces in semiconductor heterostructures relevant for electro...
| Auteurs principaux: | , , , , |
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| Format: | Article |
| Langue: | English |
| Publié: |
Wiley-VCH
2023-01-01
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| Collection: | Advanced Materials Interfaces |
| Sujets: | |
| Accès en ligne: | https://doi.org/10.1002/admi.202201189 |