Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing

Optoelectronic integrated circuit (OEIC) technology has attracted considerable research attention. Studies have achieved numerous breakthroughs in the basic scientific problems, key technologies, demonstration applications, and industrial promotions of OEIC. This study details the technical process,...

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Bibliographic Details
Main Authors: Mengjie Liang, Ji Fang, Dunkui Chen, Lang Chen, Lingling Peng, Chi Zhang, Yingchun Chen, Xiang Lu
Format: Article
Language:English
Published: MDPI AG 2024-09-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/14/17/8073