Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing
Optoelectronic integrated circuit (OEIC) technology has attracted considerable research attention. Studies have achieved numerous breakthroughs in the basic scientific problems, key technologies, demonstration applications, and industrial promotions of OEIC. This study details the technical process,...
Main Authors: | , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2024-09-01
|
Series: | Applied Sciences |
Subjects: | |
Online Access: | https://www.mdpi.com/2076-3417/14/17/8073 |