Monolithically Fabricated Waveguide for Efficient Guiding and Emission of Visible Light for IoT Applications
We present monolithically integrated waveguide with thin isolated layers of dielectric material, which ensure efficient emission of guided light in multiple optical windows. The proposed waveguide is fabricated by using silicon oxynitride (SiON) which functions as the core guiding layer, and silicon...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2022-01-01
|
| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9996350/ |