Morpho-Mechanical Characterization and Removal Strategy of Pile-Ups in AFM-Based Nanolithography
Nowadays, mechanical AFM-based nanolithography has emerged as the most promising nanolithography technique, allowing the patterning of nanostructures on polymer layers with a sub-nanometer resolution. In such a stimulating context, we developed the Pulse-AFM method to obtain continuous structures wi...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-03-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/97/1/69 |