Spatial mapping of photovoltage and light-induced displacement of on-chip coupled piezo/photodiodes by Kelvin probe force microscopy under modulated illumination

In this work, a silicon photodiode integrated with a piezoelectric membrane is studied by Kelvin probe force microscopy (KPFM) under modulated illumination. Time-dependent KPFM enables simultaneous quantification of the surface photovoltage generated by the photodiode as well as the resulting mechan...

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Bibliographic Details
Main Authors: Zeinab Eftekhari, Nasim Rezaei, Hidde Stokkel, Jian-Yao Zheng, Andrea Cerreta, Ilka Hermes, Minh Nguyen, Guus Rijnders, Rebecca Saive
Format: Article
Language:English
Published: Beilstein-Institut 2023-11-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.14.87