Waterproofing a Thermally Actuated Vibrational MEMS Viscosity Sensor
An efficient and inexpensive post-process method to waterproof an electrically actuated microtransducer has been studied. The electrical signals of microtransducers operating in electrically conductive fluids must be effectively isolated from the surrounding environment while remaining in contact fo...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-02-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/13/2/57 |