Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge
The vacuum chamber is an important part of microparticle optical levitation technology. The traditional vacuum chamber has a large volume and many peripheral components, which cannot meet the requirements of miniaturization and on-chip optical levitation technology. Therefore, this study proposes a...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-11-01
|
| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/9/12/911 |