Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge
The vacuum chamber is an important part of microparticle optical levitation technology. The traditional vacuum chamber has a large volume and many peripheral components, which cannot meet the requirements of miniaturization and on-chip optical levitation technology. Therefore, this study proposes a...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-11-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/9/12/911 |
| _version_ | 1797455633452105728 |
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| author | Junji Pu Kai Zeng Yulie Wu Dingbang Xiao |
| author_facet | Junji Pu Kai Zeng Yulie Wu Dingbang Xiao |
| author_sort | Junji Pu |
| collection | DOAJ |
| description | The vacuum chamber is an important part of microparticle optical levitation technology. The traditional vacuum chamber has a large volume and many peripheral components, which cannot meet the requirements of miniaturization and on-chip optical levitation technology. Therefore, this study proposes a novel microparticle vacuum chamber based on the micro-electro-mechanical system (MEMS) process. This MEMS microparticle vacuum chamber adopts a “glass-silicon-glass” three-layer vacuum bonding process, with a volume of only 15 mm × 12 mm × 1.2 mm, including particle chamber, cantilever resonator chamber, and getter chamber, which can encapsulate microparticles in a tiny vacuum environment and realize optical levitation of microparticles. At the same time, the air pressure in the micro vacuum chamber is monitored by the cantilever resonator, which can provide a miniaturized microparticle chamber with a more accurate vacuum environment for microparticle optical levitation. The research of this paper has significance for promoting the development of miniaturized optical levitation technology. |
| first_indexed | 2024-03-09T15:57:06Z |
| format | Article |
| id | doaj.art-1ada70c278b24aecb5bbd109c16396c1 |
| institution | Directory Open Access Journal |
| issn | 2304-6732 |
| language | English |
| last_indexed | 2024-03-09T15:57:06Z |
| publishDate | 2022-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Photonics |
| spelling | doaj.art-1ada70c278b24aecb5bbd109c16396c12023-11-24T17:24:38ZengMDPI AGPhotonics2304-67322022-11-0191291110.3390/photonics9120911Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum GaugeJunji Pu0Kai Zeng1Yulie Wu2Dingbang Xiao3College of Intelligent Sciences, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Sciences, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Sciences, National University of Defense Technology, Changsha 410073, ChinaCollege of Intelligent Sciences, National University of Defense Technology, Changsha 410073, ChinaThe vacuum chamber is an important part of microparticle optical levitation technology. The traditional vacuum chamber has a large volume and many peripheral components, which cannot meet the requirements of miniaturization and on-chip optical levitation technology. Therefore, this study proposes a novel microparticle vacuum chamber based on the micro-electro-mechanical system (MEMS) process. This MEMS microparticle vacuum chamber adopts a “glass-silicon-glass” three-layer vacuum bonding process, with a volume of only 15 mm × 12 mm × 1.2 mm, including particle chamber, cantilever resonator chamber, and getter chamber, which can encapsulate microparticles in a tiny vacuum environment and realize optical levitation of microparticles. At the same time, the air pressure in the micro vacuum chamber is monitored by the cantilever resonator, which can provide a miniaturized microparticle chamber with a more accurate vacuum environment for microparticle optical levitation. The research of this paper has significance for promoting the development of miniaturized optical levitation technology.https://www.mdpi.com/2304-6732/9/12/911optical levitationMEMS microparticle chambervacuum measurementwafer-level vacuum packaging |
| spellingShingle | Junji Pu Kai Zeng Yulie Wu Dingbang Xiao Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge Photonics optical levitation MEMS microparticle chamber vacuum measurement wafer-level vacuum packaging |
| title | Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge |
| title_full | Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge |
| title_fullStr | Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge |
| title_full_unstemmed | Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge |
| title_short | Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge |
| title_sort | research on a mems microparticles vacuum chamber for optical levitation with a built in vacuum gauge |
| topic | optical levitation MEMS microparticle chamber vacuum measurement wafer-level vacuum packaging |
| url | https://www.mdpi.com/2304-6732/9/12/911 |
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