Wafer-Scale Fabrication of Silicon Nanocones via Controlling Catalyst Evolution in All-Wet Metal-Assisted Chemical Etching

Bibliographic Details
Main Authors:	Chenyu Bian, Bingchang Zhang, Zhenghe Zhang, Hui Chen, Dake Zhang, Shaojun Wang, Jing Ye, Le He, Jiansheng Jie, Xiaohong Zhang
Format:	Article
Language:	English
Published:	American Chemical Society 2022-01-01
Series:	ACS Omega
Online Access:	https://doi.org/10.1021/acsomega.1c05790

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