Micro Linear Ultrasonic Motor With a Hall Sensor-Based Feedback Control System
We propose a one-millimeter-scale linear ultrasonic motor and its feedback control system with a Hall sensor. The size of the stator measures 1.6 mm in height, 1.6 mm in width, and 0.3 mm in thickness, and there is a hole with a diameter of 0.6 mm at the center, which is one of the smallest linear m...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2024-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10664586/ |