Role of Nitrogen and Yttrium Contents in Manufacturing (Cr, Y)N<sub>x</sub> Film Nanostructures

Role of Nitrogen and Yttrium Contents in Manufacturing (Cr, Y)N<sub>x</sub> Film Nanostructures

The high-power impulse magnetron sputtering (HiPIMS) technique was applied to deposit multilayer-like (Cr, Y)N<sub>x</sub> coatings on AISI 304L stainless steel, using pendular substrate oscillation and a Cr-Y target and varying the nitrogen flow rate from 10 to 50 sccm. The microstructu...

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Bibliographic Details
Main Authors: Raira Chefer Apolinario, Alisson Mendes Rodrigues, Pedro Renato Tavares Avila, Júlia Nascimento Pereira, Carlos Alberto Ospina Ramirez, Philipp Daum, Fabiana Pereira da Costa, Hélio de Lucena Lira, Gelmires de Araújo Neves, Christian Greiner, Haroldo Cavalcanti Pinto
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Nanomaterials
Subjects:
(Cr, Y)N<sub>x</sub>
HiPIMS
nitrogen flow rate
wear protection
Online Access:https://www.mdpi.com/2079-4991/12/14/2410

Internet

https://www.mdpi.com/2079-4991/12/14/2410

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