A passive acceleration sensor with mechanical 6 bit memory and mechanical analog-to-digital converter
This paper presents the design, modeling, fabrication and characterization of a passive micromechanical acceleration sensor intended for condition monitoring. The sensor is composed of purely micromechanical components forming a mechanical integrated sensing circuit, which allows to measure, select,...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-06-01
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| Series: | Micro and Nano Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007222000399 |