Multi objective design optimization of graphene piezoresistive MEMS pressure sensor using design of experiment
This paper investigates the effect of diaphragm thickness, dimensions of piezoresistors, doping profile and temperature compatibility on sensitivity and non-linearity of graphene MEMS pressure sensor. Taguchi method is used for maximizing the sensitivity and minimizing the nonlinearity of the design...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2022-01-01
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| Series: | International Journal for Simulation and Multidisciplinary Design Optimization |
| Subjects: | |
| Online Access: | https://www.ijsmdo.org/articles/smdo/full_html/2022/01/smdo220021/smdo220021.html |