Comparison of Measurements with Finite-Element Analysis of Silicon-Diaphragm-Based Fiber-Optic Fabry–Perot Temperature Sensors
Silicon-diaphragm-based fiber-optic Fabry−Perot sensors with different intracavity pressures were fabricated by anodic bonding and microelectromechanical techniques. The thermal stress and thermal expansion of the Fabry−Perot (FP) sensor caused by high-temperature bonding and tem...
| Autori principali: | , , , , |
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| Natura: | Articolo |
| Lingua: | English |
| Pubblicazione: |
MDPI AG
2019-11-01
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| Serie: | Sensors |
| Soggetti: | |
| Accesso online: | https://www.mdpi.com/1424-8220/19/21/4780 |