Branched High Aspect Ratio Nanostructures Fabricated by Focused Helium Ion Beam Induced Deposition of an Insulator
Helium ion beam induced deposition using the gaseous precursor pentamethylcyclopentasiloxane is employed to fabricate high aspect ratio insulator nanostructures (nanopillars and nanocylinders) that exhibit charge induced branching. The branched nanostructures are analyzed by transmission electron mi...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-02-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/3/232 |