Experimental study on subwavelength focusing optical field detection methods for micro-Fresnel zone plate

In this paper, the detection methods and detection systems for the subwavelength focusing optical field of the micro-Fresnel zone plate (FZP) are experimentally studied. First, a comparison is made between the micro/nanofabrication methods for micro-FZP, namely, focused ion beam (FIB) and electron b...

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Bibliographic Details
Main Authors: Qiang Liu, Yuanhao Deng, Jing Xu, Junli Wang, Wenshuai Liu, Xiaomin Yao
Format: Article
Language:English
Published: AIP Publishing LLC 2024-02-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0193428