Traceable low-current measurements for a novel ionization gauge suitable as reference standard
A novel ionization gauge was developed where the electron beam is guided through the ionization space in a straight path. This design was chosen in order to develop a more stable ionization vacuum gauge suitable as reference standard in the range of 10−6 Pa to 10−2 Pa. The design requires a low elec...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421001653 |