Traceable low-current measurements for a novel ionization gauge suitable as reference standard
A novel ionization gauge was developed where the electron beam is guided through the ionization space in a straight path. This design was chosen in order to develop a more stable ionization vacuum gauge suitable as reference standard in the range of 10−6 Pa to 10−2 Pa. The design requires a low elec...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917421001653 |
| _version_ | 1818388682484219904 |
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| author | Matthias Bernien Martin Götz Claus Illgen Dietmar Drung Christian Krause Thomas Bock Karl Jousten |
| author_facet | Matthias Bernien Martin Götz Claus Illgen Dietmar Drung Christian Krause Thomas Bock Karl Jousten |
| author_sort | Matthias Bernien |
| collection | DOAJ |
| description | A novel ionization gauge was developed where the electron beam is guided through the ionization space in a straight path. This design was chosen in order to develop a more stable ionization vacuum gauge suitable as reference standard in the range of 10−6 Pa to 10−2 Pa. The design requires a low electron current resulting in even lower ion currents. For the purpose of a reference standard, these ultra-low currents in the range 1 pA–100 nA need to be measured in a traceable manner. For the first time, an ultrastable low-noise current amplifier was used for this purpose. |
| first_indexed | 2024-12-14T04:29:43Z |
| format | Article |
| id | doaj.art-1d325fabc2a04f83b76d90d75fee022a |
| institution | Directory Open Access Journal |
| issn | 2665-9174 |
| language | English |
| last_indexed | 2024-12-14T04:29:43Z |
| publishDate | 2021-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Measurement: Sensors |
| spelling | doaj.art-1d325fabc2a04f83b76d90d75fee022a2022-12-21T23:17:06ZengElsevierMeasurement: Sensors2665-91742021-12-0118100202Traceable low-current measurements for a novel ionization gauge suitable as reference standardMatthias Bernien0Martin Götz1Claus Illgen2Dietmar Drung3Christian Krause4Thomas Bock5Karl Jousten6Corresponding author.; Physikalisch-Technische Bundesanstalt, Braunschweig and Berlin, GermanyPhysikalisch-Technische Bundesanstalt, Braunschweig and Berlin, GermanyPhysikalisch-Technische Bundesanstalt, Braunschweig and Berlin, GermanyPhysikalisch-Technische Bundesanstalt, Braunschweig and Berlin, GermanyPhysikalisch-Technische Bundesanstalt, Braunschweig and Berlin, GermanyPhysikalisch-Technische Bundesanstalt, Braunschweig and Berlin, GermanyPhysikalisch-Technische Bundesanstalt, Braunschweig and Berlin, GermanyA novel ionization gauge was developed where the electron beam is guided through the ionization space in a straight path. This design was chosen in order to develop a more stable ionization vacuum gauge suitable as reference standard in the range of 10−6 Pa to 10−2 Pa. The design requires a low electron current resulting in even lower ion currents. For the purpose of a reference standard, these ultra-low currents in the range 1 pA–100 nA need to be measured in a traceable manner. For the first time, an ultrastable low-noise current amplifier was used for this purpose.http://www.sciencedirect.com/science/article/pii/S2665917421001653Ionization vacuum gaugeSensitivityLow currentTraceable measurementsMetrology |
| spellingShingle | Matthias Bernien Martin Götz Claus Illgen Dietmar Drung Christian Krause Thomas Bock Karl Jousten Traceable low-current measurements for a novel ionization gauge suitable as reference standard Measurement: Sensors Ionization vacuum gauge Sensitivity Low current Traceable measurements Metrology |
| title | Traceable low-current measurements for a novel ionization gauge suitable as reference standard |
| title_full | Traceable low-current measurements for a novel ionization gauge suitable as reference standard |
| title_fullStr | Traceable low-current measurements for a novel ionization gauge suitable as reference standard |
| title_full_unstemmed | Traceable low-current measurements for a novel ionization gauge suitable as reference standard |
| title_short | Traceable low-current measurements for a novel ionization gauge suitable as reference standard |
| title_sort | traceable low current measurements for a novel ionization gauge suitable as reference standard |
| topic | Ionization vacuum gauge Sensitivity Low current Traceable measurements Metrology |
| url | http://www.sciencedirect.com/science/article/pii/S2665917421001653 |
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