CMOS-Compatible Ultralow-Loss Three-Step Silicon Edge Coupler with Substrate Substitution in the Whole Communication Band

Edge coupler is a key component of silicon-based optoelectronic chips, which dramatically reduces the coupling loss between fibers and transmission waveguides. Here, we propose an ultralow-loss three-step silicon edge coupler based on a 130 nm CMOS process. By replacing the silicon substrate with a...

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Bibliographic Details
Main Authors: Zhen Wang, Jin Zhang, Lei Zhang, Xiaoke Ruan, Weijie Tang, Tao Chu
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/1/66