Characterization of Surface Micro-Roughness by Off-Specular Measurements of Polarized Optical Scattering
The characterization of surface micro-roughness is investigated by using off-specular measurements of polarized optical scattering. In the measurement system, the detection angles of optical scattering are defined by the vertical and level scattering angles. The rotating mechanism of angles is contr...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sciendo
2019-12-01
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| Series: | Measurement Science Review |
| Subjects: | |
| Online Access: | https://doi.org/10.2478/msr-2019-0033 |