Design Optimization for the Measurement Accuracy Improvement of a Large Range Nanopositioning Stage

Design Optimization for the Measurement Accuracy Improvement of a Large Range Nanopositioning Stage

Both an accurate machine design and an adequate metrology loop definition are critical factors when precision positioning represents a key issue for the final system performance. This article discusses the error budget methodology as an advantageous technique to improve the measurement accuracy of a...

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Bibliographic Details
Main Authors: Marta Torralba, José Antonio Yagüe-Fabra, José Antonio Albajez, Juan José Aguilar
Format: Article
Language:English
Published: MDPI AG 2016-01-01
Series:Sensors
Subjects:
error budget
2D-platform
nanopositioning
rigid body behavior
FEA static analysis
atomic force microscopy
Online Access:http://www.mdpi.com/1424-8220/16/1/84

Internet

http://www.mdpi.com/1424-8220/16/1/84

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