Molecular dynamics simulation on the effect of dislocation structures on the retention and distribution of helium ions implanted into silicon
To investigate the effect of dislocation structures on the initial formation stage of helium bubbles, molecular dynamics (MD) simulations were used in this study. The retention rate and distribution of helium ions with 2 keV energy implanted into silicon with dislocation structures were studied via...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2020-06-01
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| Series: | Nanotechnology and Precision Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S258955402030012X |