Design of a trajectory contour controller for a dual‐axis precision motion stage based on improved iterative learning
Abstract To solve the problem of contour error (CE) arising from the dual‐axis coupling of the X–Y coordinate planar motor stage under reciprocating motion conditions in integrated circuit (IC) manufacturing, the following two perspectives are considered: indirect intervention from a single‐axis ser...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2023-11-01
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| Series: | IET Control Theory & Applications |
| Subjects: | |
| Online Access: | https://doi.org/10.1049/cth2.12472 |