Microfabrication of a Novel Ceramic Pressure Sensor with High Sensitivity Based on Low-Temperature Co-Fired Ceramic (LTCC) Technology
In this paper, a novel capacitance pressure sensor based on Low-Temperature Co-Fired Ceramic (LTCC) technology is proposed for pressure measurement. This approach differs from the traditional fabrication process for a LTCC pressure sensor because a 4J33 iron-nickel-cobalt alloy is applied to avoid t...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2014-06-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/5/2/396 |