Characterization of DLC Thin Films Deposited by DC-Pulsed PACVD using Methane Precursor
In this work, Diamond Like Carbon (DLC) thin films were deposited on aluminum alloy 6061 by Plasma-Assisted Chemical Vapor Deposition (PACVD). Nitiding prior to coated leads to appropriate hardness gradient and it can greatly improve the mechanical properties of the coatings. The composition, crysta...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Islamic Azad University-Isfahan (Khorasgan) Branch
2022-03-01
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| Series: | International Journal of Advanced Design and Manufacturing Technology |
| Subjects: | |
| Online Access: | https://admt.isfahan.iau.ir/article_689935_3f5dff04365d9ea68b450e11dde516d4.pdf |