Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin Films
The morphology and the local mechanical properties of gold nitride thin films were studied by atomic force microscope (AFM). Gold nitride films were deposited for the first time on silicon substrate without any buffer layer at room temperature by reactive pulsed laser ablation deposition (RPLD). The...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
International Institute of Informatics and Cybernetics
2007-10-01
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| Series: | Journal of Systemics, Cybernetics and Informatics |
| Subjects: | |
| Online Access: | http://www.iiisci.org/Journal/CV$/sci/pdfs/P794797.pdf
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