Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin Films
The morphology and the local mechanical properties of gold nitride thin films were studied by atomic force microscope (AFM). Gold nitride films were deposited for the first time on silicon substrate without any buffer layer at room temperature by reactive pulsed laser ablation deposition (RPLD). The...
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| Format: | Article |
| Language: | English |
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International Institute of Informatics and Cybernetics
2007-10-01
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| Series: | Journal of Systemics, Cybernetics and Informatics |
| Subjects: | |
| Online Access: | http://www.iiisci.org/Journal/CV$/sci/pdfs/P794797.pdf
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| author | Armen Verdyan Ya. M. Soifer Jacob Azoulay Maurizio Martino A. P. Caricato T. Tunno Francesco Romano D. Valerini |
| author_facet | Armen Verdyan Ya. M. Soifer Jacob Azoulay Maurizio Martino A. P. Caricato T. Tunno Francesco Romano D. Valerini |
| author_sort | Armen Verdyan |
| collection | DOAJ |
| description | The morphology and the local mechanical properties of gold nitride thin films were studied by atomic force microscope (AFM). Gold nitride films were deposited for the first time on silicon substrate without any buffer layer at room temperature by reactive pulsed laser ablation deposition (RPLD). The films were fabricated on (100) Si wafers by RPLD technique in which KrF excimer laser was used to ablate a gold target in N2 atmosphere (0.1 GPa-100 Pa) and ambient temperature. Scanning electron microscopy (SEM) and atomic force microscopy inspections showed that the films were flat plane with rms roughness in the range of 35.1 nm-3.6 nm, depending on the deposition pressure. Rutherford backscattering spectrometry (RBS) and energy dispersion spectroscopy (EDS) used to detect the nitrogen concentration in the films, have revealed a composition close to Au3N. The film |
| first_indexed | 2024-12-13T00:58:58Z |
| format | Article |
| id | doaj.art-1e2504cccd9046b38b51b0fce98f0137 |
| institution | Directory Open Access Journal |
| issn | 1690-4524 |
| language | English |
| last_indexed | 2024-12-13T00:58:58Z |
| publishDate | 2007-10-01 |
| publisher | International Institute of Informatics and Cybernetics |
| record_format | Article |
| series | Journal of Systemics, Cybernetics and Informatics |
| spelling | doaj.art-1e2504cccd9046b38b51b0fce98f01372022-12-22T00:04:43ZengInternational Institute of Informatics and CyberneticsJournal of Systemics, Cybernetics and Informatics1690-45242007-10-01557580Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin FilmsArmen Verdyan0Ya. M. Soifer1Jacob Azoulay2Maurizio Martino3A. P. Caricato4T. Tunno5Francesco Romano6D. Valerini7 Holon Institute of Technology Holon Institute of Technology Hadassah Academic College Jerusalem. Holon Institute of Technology University of Lecce University of Lecce University of Lecce University of Lecce University of Lecce The morphology and the local mechanical properties of gold nitride thin films were studied by atomic force microscope (AFM). Gold nitride films were deposited for the first time on silicon substrate without any buffer layer at room temperature by reactive pulsed laser ablation deposition (RPLD). The films were fabricated on (100) Si wafers by RPLD technique in which KrF excimer laser was used to ablate a gold target in N2 atmosphere (0.1 GPa-100 Pa) and ambient temperature. Scanning electron microscopy (SEM) and atomic force microscopy inspections showed that the films were flat plane with rms roughness in the range of 35.1 nm-3.6 nm, depending on the deposition pressure. Rutherford backscattering spectrometry (RBS) and energy dispersion spectroscopy (EDS) used to detect the nitrogen concentration in the films, have revealed a composition close to Au3N. The filmhttp://www.iiisci.org/Journal/CV$/sci/pdfs/P794797.pdf NanoscratchingThin filmAtom Force MicroscopyNanoindentation |
| spellingShingle | Armen Verdyan Ya. M. Soifer Jacob Azoulay Maurizio Martino A. P. Caricato T. Tunno Francesco Romano D. Valerini Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin Films Journal of Systemics, Cybernetics and Informatics Nanoscratching Thin film Atom Force Microscopy Nanoindentation |
| title | Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin Films |
| title_full | Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin Films |
| title_fullStr | Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin Films |
| title_full_unstemmed | Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin Films |
| title_short | Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin Films |
| title_sort | nano indentation inspection of the mechanical properties of gold nitride thin films |
| topic | Nanoscratching Thin film Atom Force Microscopy Nanoindentation |
| url | http://www.iiisci.org/Journal/CV$/sci/pdfs/P794797.pdf
|
| work_keys_str_mv | AT armenverdyan nanoindentationinspectionofthemechanicalpropertiesofgoldnitridethinfilms AT yamsoifer nanoindentationinspectionofthemechanicalpropertiesofgoldnitridethinfilms AT jacobazoulay nanoindentationinspectionofthemechanicalpropertiesofgoldnitridethinfilms AT mauriziomartino nanoindentationinspectionofthemechanicalpropertiesofgoldnitridethinfilms AT apcaricato nanoindentationinspectionofthemechanicalpropertiesofgoldnitridethinfilms AT ttunno nanoindentationinspectionofthemechanicalpropertiesofgoldnitridethinfilms AT francescoromano nanoindentationinspectionofthemechanicalpropertiesofgoldnitridethinfilms AT dvalerini nanoindentationinspectionofthemechanicalpropertiesofgoldnitridethinfilms |