Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin Films

Nano Indentation Inspection of the Mechanical Properties of Gold Nitride Thin Films

The morphology and the local mechanical properties of gold nitride thin films were studied by atomic force microscope (AFM). Gold nitride films were deposited for the first time on silicon substrate without any buffer layer at room temperature by reactive pulsed laser ablation deposition (RPLD). The...

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Bibliographic Details
Main Authors: Armen Verdyan, Ya. M. Soifer, Jacob Azoulay, Maurizio Martino, A. P. Caricato, T. Tunno, Francesco Romano, D. Valerini
Format: Article
Language:English
Published: International Institute of Informatics and Cybernetics 2007-10-01
Series:Journal of Systemics, Cybernetics and Informatics
Subjects:
Nanoscratching
Thin film
Atom Force Microscopy
Nanoindentation
Online Access:http://www.iiisci.org/Journal/CV$/sci/pdfs/P794797.pdf

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