Design and characterization of a new microscopy probe using COMSOL and ANSYS
This paper presents the design, simulation, and analysis of different 3D-shapes of scanning near-field optical microscopy probes, allowing the acquisition of both topographic and optical images. The study is conducted using COMSOL and ANSYS simulation tools to study the probe sensitivity and deflect...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MULTIPHYSICS
2022-03-01
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| Series: | International Journal of Multiphysics |
| Online Access: | http://journal.multiphysics.org/index.php/IJM/article/view/785 |